홈 > 제품소개 > Motion/Vibration > Air Bearing System
제품소개
- Newport의 Air-Bearing System은 Wafer Inspection, Optical Lithography,Nano Imprint Lithography & Memory Repair 어플 리케이션 등으로 사용되고 있으며, 이미 1,000대가 넘는 시스템이 설치되어 사용되고 있다. 여러 종류의Flatform이 있는데, 자 세한 내용은 Newport Website에서 확인 가능하다.
- DynamYX™ Datum / General Specifications
- Acceleration: 3G X-Axis, 5G Y-Axis
- Velocity: 1000mm/sec
- Repeatability: ±25nm (long term)
- Accuracy: 0.2μm (linear encoders)
- Natural Frequency: 300 Hz
| General Specifications | |
|---|---|
| Travel Range (standard, encoder or Interferometer) | 380 mm X-axis, 350 mm Y-axis |
| Travel Range(macimum, encoder) | 520 mm X-axis, 350 mm Y-axis |
| Footerprint (without bridge pillars, standard travel) | 1040 mm x 918 mm |
| Rated Payload (maintanins dynamic specifications) | 3kg |
| Maximum Load Capacity | 30kg |
| Maximum Velocity (rated payload) | 1000 mm/sec X-axis, 1000 mm/sec Y-axis |
| Peak Acceleration (rated payload) | 3.0 G X-axis, 5.0 G X-axis |
| RMS Acceleration (rated payload) | 1.1 G X-axis, 1.1 G X-axis |
| Granite Base Thickness (standard travel) | 300mm |
| Total Weight | 600kg |
| Stiffness, Frist Natural Frequency (rated payload) | 300Hz |
| MTBF | 20,000hrs |
- HybrYX™ / General Specifications
- Scan & Step 어플리케이션에 적합하도록 디자인된 시스템으로, Scan Axis는 Air-Bearing 이 Step Axis는 Linear Motor가 적용된 시스템으로 아래와 같은 성능을 갖는다.
- Jitter & dynamic straightness of less than ± 25nm during high speed motion
- Better than 0.1% velocity ripple
- Compact 1200mm by 765mm footprint with 650mm by 350mm travel range
- Long-life & high MTBF as air bearing is not limited by bearing travel/life- expectancy
| General Specifications | |
|---|---|
| Travel Range (standard) | 380 mm X-axis, 650 mm Y-axis |
| Footerprint (without bridge pillars) | 1200 mm x 765 mm |
| Rated Payload (maintanins dynamic specifications) | 14kg |
| Maximum Load Capacity | 20kg |
| Maximum Velocity (rated payload) | 300 mm/sec X-axis, 600 mm/sec Y-axis (scanning) |
| Peak Acceleration (rated payload) | 3.0 G X-axis, 5.0 G X-axis |
| RMS Acceleration (rated payload) | 1.15 G X-axis, 0.2 G Y-axis |
| Granite Base Thickness (standard travel) | 250mm |
| Total Weight | 750kg |
| Stiffness, Frist Natural Frequency (rated payload) | 150Hz |
| MTBF | 20,000hrs |
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